| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a controller for controlling a movable part and a positional amount relative to the movable part at a high speed and high precision. <P>SOLUTION: The controller comprises a first controller movement function and a second controller movement function. A selector selects a first controller movement function CON1 or a second controller movement function CON2 depending on the state of the movable part. The first controller movement function CON1 is selected when the movable part is substantially in a standstill state, and the second controller movement function CON2 is selected when the movable part is substantially in non-stationary state. <P>COPYRIGHT: (C)2007,JPO&INPIT |
