| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dynamical amount detection element for improving detection accuracy of displacement of an oscillator, and a dynamical amount detector having the dynamical amount detection element. <P>SOLUTION: The dynamical amount detection element comprises mainframes 30-1 and 30-2 supported displaceably in the X-axis direction parallel to a substrate 10 surface with respect to a substrate 10, the oscillator 20 supported displaceably in the Y-axis direction parallel to the substrate 10 surface with respect to the mainframes 30-1 and 30-2 and rectangularly to the X-axis direction, and driving electrode sections that are disposed in the mainframes 30-1 and 30-2 and drive the mainframes 30-1 and 30-2 in the X-axis direction. Terminal ends 32-1 to 32-4 are formed by extending the ends of the mainframes 30-1 and 30-2 in the Y-axis direction, and the driving electrode sections 51-1 to 51-8 are arranged on both sides of the terminal ends 32-1 to 32-4 in the X-axis direction. <P>COPYRIGHT: (C)2007,JPO&INPIT |
