| 发明名称 |
APPARATUS AND FURNACE FOR HEAT TREATMENT, THERMAL INSULATION MATERIAL, AND EXHAUST DUCT |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide: an apparatus for heat treatment in which heater replacement is safely and easily performed, and replacement cost is low; a furnace for heat treatment; an insulation material; and an exhaust duct in the heat treatment apparatus. <P>SOLUTION: The apparatus for heat treatment has the furnace for heat treatment in which an exhaust duct 22 is provided in an upper part of a heater unit 21, and exhaust air lead parts 25, 26 are connected to the exhaust duct 22, wherein the exhaust duct includes an insulating material, and an elbow-like exhaust channel 23 is formed in the inside of the exhaust duct. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
| 申请公布号 |
JP2007110141(A) |
申请公布日期 |
2007.04.26 |
| 申请号 |
JP20060302825 |
申请日期 |
2006.11.08 |
| 申请人 |
HITACHI KOKUSAI ELECTRIC INC |
发明人 |
TANIYAMA TOMOSHI;KOBAYASHI MASAYUKI |
| 分类号 |
H01L21/22;F27B5/06;F27D17/00;H01L21/205;H01L21/324 |
主分类号 |
H01L21/22 |
| 代理机构 |
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代理人 |
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