| 摘要 |
PROBLEM TO BE SOLVED: To provide a head unit for forming more detailed patterns by attaining high accuracy of head sticking to a fixture in order to secure positional accuracy of a nozzle hole or an irradiation port. SOLUTION: In a pattern forming device 1, a top panel of the head 15 which is in parallel to a nozzle plate 23 where a nozzle 25 being an ejection port of the head 15 is arranged, is adhered/fixed to the fixture 19 via an adhering layer 27 to constitute a single head unit 21. At first, positioning of the head 15 is performed with high accuracy on the basis of a position of the nozzle 25 at a XY plane of the head 15. Then an adhesive is arranged between the top panel of the head 15 and a surface A29-1 of the fixture 19 and the adhesive is hardened by irradiation with UV to form the adhering layer 27 while adjusting a position of the head 15 in a z-axis direction. Since positioning of the head 15 can be freely carried out in a horizontal plane (a XY plane), pattern formation of high accuracy can be performed. The adhesive layer 27 has an effect of absorbing dispersion in parts accuracy of the fixture 19 at an adhesive face. COPYRIGHT: (C)2007,JPO&INPIT
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