| 发明名称 |
Method & apparatus for optically analyzing a surface |
| 摘要 |
A method and apparatus for analyzing a surface of a test object employs apparatus with a scanning interferometry system which generates a windowed interferometric signal from the surface of a test object to characterize the surface of the test object.
|
| 申请公布号 |
US2007091318(A1) |
申请公布日期 |
2007.04.26 |
| 申请号 |
US20060373862 |
申请日期 |
2006.03.10 |
| 申请人 |
FREISHLAD KLAUS;TANG SHOUHONG |
发明人 |
FREISHLAD KLAUS;TANG SHOUHONG |
| 分类号 |
G01B11/02;G01B9/02;G01J3/45 |
主分类号 |
G01B11/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
