发明名称 |
SEMICONDUCTOR DEVICE WITH VERTICAL ELECTRON INJECTION AND ITS MANUFACTURING METHOD |
摘要 |
A method for making a semiconductor device with vertical electron injection, including: transferring a monocrystalline thin film onto a first face of a support substrate; producing at least one electronic component from the monocrystalline thin film; forming at least one recess in a second face of the substrate to enable electric or electronic access to the electronic component through the monocrystalline thin film; and producing a vertical electron injector configured to inject electrons into the electronic component.
|
申请公布号 |
US2007093009(A1) |
申请公布日期 |
2007.04.26 |
申请号 |
US20060561685 |
申请日期 |
2006.11.20 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
BAPTIST ROBERT;LETERTRE FABRICE |
分类号 |
H01L21/338;H01J31/00;H01L21/20;H01L21/36;H01L33/00;H01L33/20;H01S5/02;H01S5/04;H01S5/042;H01S5/10;H01S5/183;H01S5/30;H01S5/323 |
主分类号 |
H01L21/338 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|