| 摘要 |
A method of coating a substrate is disclosed in which a gas is activated using an electron beam. The coated substrate is then sliced using a particle beam to reveal, in cross-section, features of the resist. Those features of the resist are measured using a scanning electron microscope and a particle beam is used to take a slice of the substrate to reveal a new cross-section. This new cross-section is then measured using the scanning electron microscope and in this way a three dimensional map of the features may be built up.
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