| 摘要 |
The inventive micro-mirror or micro-lens comprises a movable part ( 10 ) provided with a reflective or refringent area ( 17 ), a fixed part ( 14 ), elements ( 13 ) connecting the movable part ( 10 ) to the fixed part ( 14 ) and forming the axis of rotation ( 12 ) of the movable part ( 10 ) and rotation control elements ( 18 ). Said control elements comprise two or more actuators ( 19 ) which are disposed on both sides of the axis ( 12 ) and are formed by a fixed electrode ( 20 ) connected to the fixed part ( 14 ) and a movable electrode ( 21 )provided with the free end ( 21.1 ) and the end thereof connected to a driving arm ( 23 ) which is arranged in a direction substentially parallel to the axis ( 12 ) and extended away from the movable part ( 10 ). The movable electrode ( 21 ) is applied to the fixed electrode ( 20 ) by the free end thereof ( 21.1 ) when a voltage is supplied to the actuator ( 19 ), the application pressure depends on the applied voltage. Said invention can be used for optical systems.
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