Aid device for setting inspection standard

摘要

An aid device is provided to an inspection device for judging whether a target object of inspection is normal or not normal based on results obtained by calculating a characteristic quantity of waveform data obtained from the target object of inspection. The aid device provides data for determining an effective characteristic quantity and effective parameters for calculating the effective characteristic quantity for the judging. Given waveform data are divided into frames and a frame profile with a matrix-form data structure is obtained for each frame. A plurality of such frame profiles for same waveform data are obtained, and a profile describing characteristic quantities related to these waveform data is obtained from them. A plurality of such profiles are stored in a memory for different waveform data. A histogram of values at specified common position in the memory is calculated and displayed.