| 摘要 |
PROBLEM TO BE SOLVED: To provide an analysis method capable of quantitatively determining impurities, such as a metal contained in an aluminum-based ceramics, such as aluminum nitride, alumina, with higher sensitivity and more accurately, in comparison with the conventional methods. SOLUTION: The method sequentially carries out steps that is constituted of a dissolution step of dissolving the aluminum-based ceramics, by using a sulfuric acid pressurizing dissolving method; a sulfuric acid removal step of removing sulfuric acid liberated from a dissolved liquid obtained by the dissolving step, thereby obtaining a residue; a residue dissolution step of dissolving the residue obtained by the sulfuric acid removing step by using hydrochloric acid, thereby preparing a residue-containing hydrochloric acid solution; an adsorbance step of contacting anion-exchange resin with the residue contained hydrochloric acid solution obtained by the residue dissolution step; a desorption step of desorbing the components adsorbed to the anion exchange resin in the adsorbance step; and an analyzing step of analyzing the components desorbed from the anion exchange resin in the desorption step, by using an inductively-coupled plasma mass spectrometry, and the like. COPYRIGHT: (C)2009,JPO&INPIT
|
