DRIVING MEANS TO POSITION A LOAD

摘要

The invention provides an apparatus and method for positioning a moveable mass, such as the moveable components found in a typical XY table. The apparatus comprises driving means producing a driving force to move the mass along an axis, which mass has a variable center of gravity position perpendicular to said axis. The driving force from the driving means is operative to act through the center of gravity of the mass as the position of the center of gravity changes.