METHOD AND DEVICE FOR MEASURING SPHERICAL ABERRATION IN ELECTROMAGNETIC LENS

摘要

PROBLEM TO BE SOLVED: To provide a measurement method and a measuring device of the spherical aberration of an electromagnetic lens capable of precisely measuring the spherical aberration coefficient of the actual electromagnetic lens. SOLUTION: Electron beams through an objective lens (electromagnetic lens) 16 are allowed to enter a single-crystal sample 20 whose lattice constant is known, and the image data of a Ronchigram is acquired by an imaging device 18. A control section 10 inputs the image data of the Ronchigram from the image pickup device 18, performs image processing, calibrates the scale of the image, and calculates the spherical aberration coefficient from the slope of a straight line obtained by fitting a line intensity profile. COPYRIGHT: (C)2007,JPO&INPIT