| 摘要 |
PROBLEM TO BE SOLVED: To improve the characteristics of a light source device for inspection, as to a lighting optical system of a light source for inspection on a solid-state imaging element, in particular. SOLUTION: In this light source device for applying light from the light source to an imaging element under inspection via a group of lenses, two sets of lens groups in a conjugate relation for focusing a uniform surface light source on the imaging element are disposed at positions distant from each other by their focal distances and an aperture stop is provided at the midpoint of one set of lens groups. COPYRIGHT: (C)2007,JPO&INPIT
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