SILICON NITRIDE FROM AMINOSILANE USING PECVD,申请号SG20050059555-传众专利搜索

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发明名称	SILICON NITRIDE FROM AMINOSILANE USING PECVD
摘要
申请公布号	SG130958(A1)	申请公布日期	2007.04.26
申请号	SG20050059555	申请日期	2005.09.15
申请人	AIR PRODUCTS AND CHEMICALS, INC.	发明人	HOCHBERG ARTHUR KENNETH;CUTHILL KIRK SCOTT
分类号		主分类号
代理机构		代理人
主权项
地址

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