| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cerium-based abrasive material having large grinding rate and causing few polishing defects whether F, La and Nd are contained or not, if CeO<SB>2</SB>/TREO is≥40 mass%. <P>SOLUTION: The cerium-base abrasive of CeO<SB>2</SB>/TREO≥40 mass% and having the intensity ratio B/A value of 0.20-0.80 and the specific surface area of 1-150 m<SP>2</SP>/g based on BET method is provided, wherein (a) is the peak based on (111) plane in peaks obtained by X-ray diffraction using Cu-Kαray or Cu-Kα1 ray of rare earth oxide mainly composed of rare earth metal Ce and A is intensity thereof, and b is the peak based on (220) plane and B is intensity thereof. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
