摘要 |
The present invention relates to a device for analyzing particles in the nanometer or micrometer range by optical measurement of light irradiated onto the sample containing particles. Accordingly, the device of the present invention can also be referred to as a microscope. The microscope device comprises an arrangement for detection of changes of the optical properties of the sample volume, e.g. changes in absorption and/or in refractive index in space and/or in time, using an interferometer arrangement of a collimated light beam or of split beams (3, 4) generated by a beam splitter (2). The wave front of the light focused into the sample is influenced by inhomogeneities of the sample, and the resultant wave front fluctuations are subsequently measured in a wave front analyser (8), which preferably is a deep nulling interferometer. |