发明名称 MICROSCOPE
摘要 The present invention relates to a device for analyzing particles in the nanometer or micrometer range by optical measurement of light irradiated onto the sample containing particles. Accordingly, the device of the present invention can also be referred to as a microscope. The microscope device comprises an arrangement for detection of changes of the optical properties of the sample volume, e.g. changes in absorption and/or in refractive index in space and/or in time, using an interferometer arrangement of a collimated light beam or of split beams (3, 4) generated by a beam splitter (2). The wave front of the light focused into the sample is influenced by inhomogeneities of the sample, and the resultant wave front fluctuations are subsequently measured in a wave front analyser (8), which preferably is a deep nulling interferometer.
申请公布号 WO2007020272(A3) 申请公布日期 2007.04.26
申请号 WO2006EP65369 申请日期 2006.08.16
申请人 TECHNISCHE UNIVERSITAET BRAUNSCHWEIG;WALLA, PETER, J. 发明人 WALLA, PETER, J.
分类号 G01N21/45;G01N21/47 主分类号 G01N21/45
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