| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MENS acceleration sensor under little influence of a residual stress, wherein such a structure as induces unbalance of a piezoresistive characteristic is improved. <P>SOLUTION: This MENS acceleration sensor has a constitution wherein a frame-shaped frame part 12 and a weight part 11 arranged within a framework of the frame part are connected by a plurality of flexible beam parts 13. On the connection side with the frame part 12 on each beam part 13, a notch part 12A having the length U is formed on the frame part 12, and on the connection side with the weight part 11 on each beam part 13, a notch part 11A having the length Up is formed on the weight part 11. <P>COPYRIGHT: (C)2007,JPO&INPIT |
