| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel vibration resistant device. SOLUTION: The vibration resistant device is provided with a vibration resistant base 3, air springs 1, 2 supporting the vibration resistant base 3, a valve 7 carrying out air supply and exhaust of the air springs 1, 2, a position detecting means 4 for detecting a position of the vibration resistant base 3, an acceleration detecting means 5 for detecting acceleration of the vibration resistant base 3, a position feedback loop using output of the position detecting means 4, and an acceleration feedback loop using output of the acceleration detecting means 5. It also has a pressure change detecting means 13 for detecting pressure change of the air springs 1, 2, and a pressure change feedback loop using output of the pressure change detecting means 13. In the pressure change feedback loop, negative feedback of the output of the pressure change detecting means 13 is carried out through a P compensator. The valve 7 is a nozzle flapper type servo valve. COPYRIGHT: (C)2007,JPO&INPIT
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