发明名称 METAL NITRIDES AND PROCESS FOR PRODUCTION THEREOF
摘要 <p>A method for producing a metal nitride by employing a container made of a nonoxide material, wherein reaction or adhesion of a raw metal or metal nitride to be formed to the container can be avoided and inclusion of oxygen derived from the material of the container can be prevented; by securing a certain or larger supply amount and a certain or higher flow rate of the nitrogen source gas, the raw metal can be converted into a nitride with an extremely high conversion, and a metal nitride having a small amount of an unreacted raw metal remaining and containing a metal and nitrogen in a stoichiometric constant can be obtained with a high yield; a metal nitride having small amounts of unreacted raw metal remaining and oxygen included can be obtained with a high yield and is very useful as a raw material for bulk crystal growth.</p>
申请公布号 KR20070044025(A) 申请公布日期 2007.04.26
申请号 KR20077003994 申请日期 2005.08.16
申请人 MITSUBISHI CHEMICAL CORPORATION 发明人 TSUJI HIDETO
分类号 C01B21/06;C30B29/38;H01S5/323 主分类号 C01B21/06
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