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发明名称
薄膜形成之沈积系统
摘要
本发明揭示一种用于将一薄膜材料沈积于一基板上之程序,其包含将一系列气体流从一薄膜沈积系统之一施配头之输出面同时引向一基板之表面,且其中该系列气体流包含至少一第一反应性气态材料、一惰性冲洗气体及一第二反应性气态材料,其中该第一反应性气态材料能够与使用该第二反应性气态材料处理的一基板表面反应,其中该等气体流之一或多者提供一压力,其至少贡献于该基板之该表面与该施配头之该面之分离。本发明亦揭示一种能够实施此一程序之系统。
申请公布号
TW200934886
申请公布日期
2009.08.16
申请号
TW097136923
申请日期
2008.09.25
申请人
柯达公司
发明人
大卫H 李维;罗杰S 柯尔;杰佛瑞T 凯利
分类号
C23C16/455(2006.01);H01L21/205(2006.01)
主分类号
C23C16/455(2006.01)
代理机构
代理人
陈长文
主权项
地址
美国
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