CERIUM OXIDE CERAMIC CONTAINING COMPONENTS IN SEMICONDUCTOR PROCESSING EQUIPMENT

摘要

A corrosion resistant component of semiconductor processing equipment such as a plasma chamber comprises a monolithic body of a cerium oxide containing ceramic material. The cerium oxide containing ceramic material comprises one or more cerium oxides as the single largest constituent thereof. The component is manufactured by preparing a slurry comprising a cerium oxide containing ceramic material, forming a green compact from the slurry in the desired shape, and sintering the green compact.