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发明名称
METHOD AND APPARATUS FOR INTERFEROMETRIC MEASUREMENT OF COMPONENTS WITH LARGE ASPECT RATIOS
摘要
申请公布号
EP1776555(A2)
申请公布日期
2007.04.25
申请号
EP20050785520
申请日期
2005.08.12
申请人
ZYGO CORPORATION
发明人
EVANS, CHRISTOPHER, JAMES
分类号
G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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