摘要 |
The plant for monosilane obtaining by catalytic disproportionation of trichlorosilane comprising counter-flow catalytic reactor with reaction and rectification areas, vaporizer, connected with reactor's rectification area and equipped with the line of liquid product withdrawal from the vaporized, and condensers, connected in series with reactor' reaction area by lines of delivery of non-condensed phase, at that reaction area is equipped with trichlorosilane delivery line and the line of chlorosilane condensates recycle, at that reactor' rectification area comprises reinforcement and exhaustive parts, located in series in the direction with vapour mixture from the vaporizer, reactor's reaction area is connected with reinforcement part of rectification area by the line of delivery of counter-flow of condensed phase.
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