发明名称 |
Method for forming microelectronic spring structures on a substrate |
摘要 |
The invention relates to a method of forming a molded surface on a substrate (32) using a stamping tool (34) having at least a portion that is translucent, said method comprising pressing said stamping tool (34) into a layer (30) of moldable material on said substrate (32); directing a curing stimulus through at least a portion of said translucent portion of said stamping tool (34), wherein at least a portion of said moldable material (30) is cured. |
申请公布号 |
EP1777194(A2) |
申请公布日期 |
2007.04.25 |
申请号 |
EP20060024417 |
申请日期 |
2002.02.06 |
申请人 |
FORMFACTOR, INC. |
发明人 |
ELDRIDGE, BENJAMIN N.;WENZEL, STUART W. |
分类号 |
B81B3/00;B81C1/00;G01R1/04;G01R1/067;G01R1/073;G01R3/00;H01H11/04;H01L21/768;H01L23/48;H01L23/482;H01R13/24;H05K3/40;H05K7/10 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|