OPTICAL INSPECTION SYSTEM

摘要

An optical inspection system includes a first optical module and a second optical module. The first optical module includes a first light source having a first optical axis and a first image capturing unit having a first image capturing axis. The first optical axis and the first image capturing axis are symmetric relative a normal line of an inspection plane. A first angle is formed between the first optical axis and the first image capturing axis. The second optical module includes a second light source having a second optical axis and a second image capturing unit having a second image capturing axis. The second optical axis and the second image capturing axis are symmetric relative to the normal line. A second angle is formed between the second optical axis and the second image capturing axis and is different from the first angle.

主权项

1. An optical inspection system for inspecting a device under test, the optical inspection system comprising:
a first optical module, comprising:
a first light source having a first optical axis; anda first image capturing unit having a first image capturing axis, wherein the first optical axis and the first image capturing axis are symmetric relative a normal line of an inspection plane on the device under test, and a first angle is formed between the first optical axis and the first image capturing axis; and a second optical module, comprising:
a second light source having a second optical axis; anda second image capturing unit having a second image capturing axis, wherein the second optical axis and the second image capturing axis are symmetric relative to the normal line, a second angle is formed between the second optical axis and the second image capturing axis, and the second angle is different from the first angle.