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发明名称
摘要
申请公布号	JP3910887(B2)	申请公布日期	2007.04.25
申请号	JP20020228500	申请日期	2002.08.06
申请人		发明人
分类号	H01L51/50;H05B33/14;H05B33/26;H05B33/28	主分类号	H01L51/50
代理机构		代理人
主权项
地址

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