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发明名称
Method of manufacturing a ferroelectric capacitor device
摘要
申请公布号
EP1128418(B1)
申请公布日期
2007.04.25
申请号
EP20010104255
申请日期
2001.02.22
申请人
QIMONDA AG
发明人
WEINRICH, VOLKER;KASKO, IGOR;HARTNER, WALTER;SCHINDLER, GUENTHER
分类号
H01L21/02;H01L27/105;H01L21/316;H01L21/8246
主分类号
H01L21/02
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