Apparatus for bearing shaft for conveying glass substrate,申请号KR20050092213-传众专利搜索

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发明名称	Apparatus for bearing shaft for conveying glass substrate
摘要
申请公布号	KR100711291(B1)	申请公布日期	2007.04.25
申请号	KR20050092213	申请日期	2005.09.30
申请人		发明人
分类号	H01L21/68;G02F1/13	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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