发明名称 Fabrication of close-spaced MEMS devices by method of precise adhesion regulation
摘要 In one aspect, the present invention provides a method for fabricating two layers separated by a gap comprising the steps of: (a) providing a first material; (b) treating the first material to reduce the number of available bonding centers; (c) placing a second material over the first material and allowing bonds to form between the two materials to form a composite; and (d) separating the composite so formed along the boundary of the two materials. In a further aspect, subsequent layers of material may be introduced to the composite by repeating steps (b) and (c) under conditions where adhesion between the subsequent layers is greater, smaller or substantially the same as the adhesion between the first and second material.
申请公布号 US7208021(B1) 申请公布日期 2007.04.24
申请号 US20050058308 申请日期 2005.02.14
申请人 BOREALIS TECHNICAL LIMITED 发明人 VARDOSANIDZE LASHA;TALIASHVILI ZAZA;TAVKHELIDZE AVTO;COX RODNEY THOMAS
分类号 H01L21/00 主分类号 H01L21/00
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