发明名称 |
Diffractive thin-film piezoelectric micromirror and method of producing the same |
摘要 |
Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner, and a method of producing the same.
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申请公布号 |
US7209290(B2) |
申请公布日期 |
2007.04.24 |
申请号 |
US20040938133 |
申请日期 |
2004.09.10 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
AN SEUNG-DO;YUN SANG KYEONG;SONG JONG-HYEONG |
分类号 |
G02B6/26;G02B26/00;G02B26/08 |
主分类号 |
G02B6/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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