发明名称 |
Precision position determining method |
摘要 |
A method for generating a surface profile of a microstructure. The profile is processed to determine positions of at least two edges and an approximate center point of the profiled surface. Segments of points on the determined profile are fit to a straight line centered at the approximate center point. A standard deviation of the fitted points is measured. The length and position of the segment are varied until a minimum standard deviation is determined and the process is repeated for segments having different lengths. The point is determined from the longest segment having a standard deviation approximately equal to the minimum standard deviation of all of the segment lengths.
|
申请公布号 |
US7209858(B1) |
申请公布日期 |
2007.04.24 |
申请号 |
US20050240756 |
申请日期 |
2005.09.30 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD |
发明人 |
CHENG CHEN-HSIUNG |
分类号 |
G01B3/22;G01B5/20;G01B7/28 |
主分类号 |
G01B3/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|