发明名称 |
Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode |
摘要 |
An RMIM electrode, a method for manufacturing the RMIM electrode, and a sputtering apparatus using the RMIM electrode, wherein the RMIM electrode includes a magnet unit including a cylinder-shaped magnet located at a center of the magnet unit and a plurality of ring-shaped magnets having increasingly larger diameters surrounding the cylinder-shaped magnet; and a driver unit for supporting and for off-axis-rotating the magnet unit, wherein in the magnet unit, adjacent magnets have opposite magnetization directions.
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申请公布号 |
US7208878(B2) |
申请公布日期 |
2007.04.24 |
申请号 |
US20060336880 |
申请日期 |
2006.01.23 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SHIN JAI-KWANG;KIM SEONG-GU;PARK YOUNG-KYOU;UM HYEON-ILL |
分类号 |
C23C14/35;H01J25/50;H01J9/236;H01J23/10;H01J37/34;H01L21/203 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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