| 摘要 |
With an assumption that the three data of the position (X<SUB>1</SUB>, Y<SUB>1</SUB>) of the first positioning pattern 202 and position (X<SUB>2</SUB>, Y<SUB>2</SUB>) of the second positioning pattern 212 of the reference chip 200 , and the position (X<SUB>3</SUB>, Y<SUB>3</SUB>) of the first positioning pattern 232 of the bonding object chip 230 , as well as the length L of a line segment connecting (X<SUB>1</SUB>, Y<SUB>1</SUB>) and (X<SUB>2</SUB>, Y<SUB>2</SUB>), and the angle theta<SUB>2 </SUB>of this line segment with respect to the X axis, are known, the coordinates (X<SUB>4</SUB>, Y<SUB>4</SUB>) of the center position of the imaging range 250 that is to be imaged next is determined by detecting the inclination-angle Deltatheta of the first positioning pattern 232 of the bonding object chip 230 . Furthermore, the imaging range can be narrowed and the second positioning pattern 252 can be captured by increasing the precision of Deltatheta. |
