发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device is proposed which includes: a semiconductor substrate of a first conductivity type; a channel region formed at a surface of the semiconductor substrate; source and drain regions of a second conductivity type formed at both sides of the channel region in the semiconductor substrate; an insulating layer covering the channel region; and a gate electrode formed on the insulating layer, the insulating layer containing impurity atoms in such a manner that a concentration thereof is non-uniformly distributed along a surface parallel to the semiconductor substrate.
申请公布号 US7208360(B2) 申请公布日期 2007.04.24
申请号 US20060385932 申请日期 2006.03.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SATAKE HIDEKI
分类号 H01L21/336;H01L29/78;H01L21/225;H01L21/28;H01L29/51 主分类号 H01L21/336
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