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发明名称
SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR100711069(B1)
申请公布日期
2007.04.24
申请号
KR20050005745
申请日期
2005.01.21
申请人
发明人
分类号
B05C5/02;H01L21/304;B05B13/02;B05B15/02;B05C11/00;B05C11/10;H01L21/027
主分类号
B05C5/02
代理机构
代理人
主权项
地址
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