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发明名称
APPARATUS FOR TREATING THE SURFACE OF A SUBSTRATE WITH PLASMA IN ATMOSPHERIC PRESSURE
摘要
申请公布号
KR20070042381(A)
申请公布日期
2007.04.23
申请号
KR20050098236
申请日期
2005.10.18
申请人
SEMTECHNOLOGY CO., LTD.
发明人
LHO, TAI HYEOP
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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