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发明名称
CLEANER DEVICE FOR SUCTION TABLE AND GANTRY HAVING THE SAME
摘要
申请公布号
KR20070042388(A)
申请公布日期
2007.04.23
申请号
KR20050098257
申请日期
2005.10.18
申请人
NARAE NANOTECH CO., LTD.
发明人
SUNG, DAL JE
分类号
H01J9/20;H01J11/20
主分类号
H01J9/20
代理机构
代理人
主权项
地址
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