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发明名称
NON-CONTACT TRANSPORT APPARATUS
摘要
申请公布号
KR100709788(B1)
申请公布日期
2007.04.23
申请号
KR20050114981
申请日期
2005.11.29
申请人
发明人
分类号
H01L21/68;B65G49/07
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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