Indexed inline substrate processing tool

摘要

In some embodiments, an indexed inline substrate processing tool may include a substrate carrier having a base and pair of opposing substrate supports having respective substrate support surfaces that extend upwardly and outwardly from the base; and a plurality of modules coupled to one another in a linear arrangement, wherein each module of the plurality of modules comprises an enclosure having a first end, a second end, and a lower surface to support the substrate carrier and to provide a path for the substrate carrier to move linearly through the plurality of modules, and wherein at least one module of the plurality of modules comprises: a window disposed in a side of the enclosure; a heating lamp coupled to the side of the enclosure; a gas inlet disposed proximate a top of the enclosure; and an exhaust disposed opposite the gas inlet.

主权项

1. An indexed inline substrate processing tool, comprising:
a substrate carrier having:
a base disposed horizontally along a bottom portion of the indexed inline substrate processing tool;a pair of opposing substrate supports having respective substrate support surfaces that extend upwardly and outwardly arranged in a “v” shape from a top surface of the base, wherein each of the pair of opposing substrate supports is only supported along a bottom portion of the substrate support, and wherein the pair of substrate supports are configured to support at least one substrate such that a top surface of each substrate disposed on a first substrate support of the pair of substrate supports faces a top surface of another substrate disposed on a second substrate support of the pair of substrate supports; anda plurality of slots formed in the top surface of the base, wherein each of the plurality of substrate supports are partially disposed within a respective each of the plurality of slots; and a plurality of modules coupled to one another in a linear arrangement, wherein each module of the plurality of modules comprises an enclosure having a first end, a second end, and a lower surface to support the substrate carrier and to provide a path for the substrate carrier to move linearly through the plurality of modules from a first module of the plurality of modules, through any intervening modules, to a last module of the plurality of modules, and wherein at least one module of the plurality of modules comprises:
a window disposed in a side of the enclosure to allow radiant heat to be provided into the enclosure;a heating lamp coupled to the side of the enclosure to provide radiant heat into the enclosure through the window;a gas inlet disposed proximate a top of the enclosure to provide a process gas into the enclosure; andan exhaust disposed opposite the gas inlet to remove the process gas from the enclosure.