| 发明名称 |
METAL ORGANIC CHEMICAL VAPOR DEPOSITION APPARATUS FOR SOLAR CELL |
| 摘要 |
A metal organic chemical vapor deposition apparatus for a solar cell includes a deposition unit. The deposition unit includes a susceptor to be mounted with a substrate, and a shower head to prepare a reacting gas by mixing plural kinds of raw gases for deposition and supply the reacting gas to the susceptor. |
| 申请公布号 |
US2016225933(A1) |
申请公布日期 |
2016.08.04 |
| 申请号 |
US201615013824 |
申请日期 |
2016.02.02 |
| 申请人 |
LG ELECTRONICS INC. |
发明人 |
YOU Dongjoo;YOON Wonki;LEE Heonmin |
| 分类号 |
H01L31/18;C23C16/455 |
主分类号 |
H01L31/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A metal organic chemical vapor deposition apparatus for a solar cell, the apparatus comprising a deposition unit, the deposition unit comprising:
a susceptor configured to be mounted with a substrate; and a shower head configured to prepare a reacting gas by mixing plural kinds of raw gases for deposition on the substrate and supply the reacting gas to the susceptor. |
| 地址 |
Seoul KR |
