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经营范围
发明名称
REAL TIME POLISHING PROCESS MONITORING
摘要
申请公布号
EP1773541(A1)
申请公布日期
2007.04.18
申请号
EP20050759837
申请日期
2005.06.10
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
ZHANG, JIAN;WYLIE, IAN
分类号
B24B37/04;B24B49/10
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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