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发明名称
摘要
申请公布号	JP3906577(B2)	申请公布日期	2007.04.18
申请号	JP19980229336	申请日期	1998.07.30
申请人		发明人
分类号	G01B21/30;H01L21/02;G01N37/00;G01Q30/04;G01Q60/24;H01L21/66;H01L21/677	主分类号	G01B21/30
代理机构		代理人
主权项
地址

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