Thermoelectric pixel for temperature sensing, temperature control and thermal energy harvesting

摘要

A thermoelectric pixel includes a micro-platform and a device layer having one or more support layers suspended at a perimeter thereof. The pixel includes structures which reduce thermal conductivity and improve platform planarity. In embodiments providing an infrared sensor, carbon nanotubes are used to enhance infrared absorption into the sensor pixel. In other embodiments, the pixel provides a thermoelectric energy harvester.

主权项

1. An apparatus comprising a thermoelectric pixel wherein the pixel comprises:
a micro-platform and a device layer having one or more support layers suspended at a perimeter thereof at least one support layer comprised of a stress-enhancing film disposed to provide a tensile stress across the micro-platform; an off-platform region, the off-platform region surrounding the micro-platform; a plurality of thermoelectric devices wherein a first junction of each thermoelectric device is disposed in or on the device layer and a second junction of each thermoelectric device is disposed in or on the off-platform region; wherein the thermoelectric devices are operated in one or both of Seebeck and Peltier modes; a plurality of nanowires, wherein the nanowires electrically couple the first junctions to respective second junctions and have a physical adaptation that enhances scattering and/or resonance of phonons;