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发明名称
ELECTRONIC BEAM DEVICE
摘要
申请公布号
EP1774560(A1)
申请公布日期
2007.04.18
申请号
EP20050769748
申请日期
2005.07.28
申请人
CARL ZEISS NTS GMBH
发明人
ESSERS, ERIK;BENNER, GERD;DREXEL, VOLKER
分类号
H01J37/244;H01J37/28
主分类号
H01J37/244
代理机构
代理人
主权项
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