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发明名称
SURFACE TREATING METHOD USING ION BEAM AND SURFACE TREATING DEVICE
摘要
申请公布号
EP1628335(A4)
申请公布日期
2007.04.18
申请号
EP20040745396
申请日期
2004.05.28
申请人
KYOTO UNIVERSITY
发明人
TAKAOKA, GIKAN
分类号
H01L21/304;B08B7/00;C23C14/22;C23F1/00;H01J37/08;H01L21/306
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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