发明名称 |
Piezoelectric thin film element |
摘要 |
A piezoelectric thin film element that includes a substrate, a lower electrode on the substrate, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film. The piezoelectric film is a potassium sodium niobate film represented, as its main constituent, by the general formula (1−n)(K1-xNax)NbyO3-nM1M2O3 in which M1 is any one of Ca, Sr, and Ba, and M2 is Zr, and x, y, and n respectively are within the ranges of: 0.25≦x≦1.00; 0.85≦y≦1.10; and 0.01≦n≦0.10. Alternatively, M2 is any one of Sn and Hf, and x, y, and n respectively are within the ranges of: 0.25≦x≦1.00; 0.90≦y≦1.05; and 0.01≦n≦0.10. |
申请公布号 |
US9437805(B2) |
申请公布日期 |
2016.09.06 |
申请号 |
US201314053902 |
申请日期 |
2013.10.15 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
Shiraki Hiroshi |
分类号 |
H01L41/18;H01L41/16;C04B35/495;H01L41/08;H01L41/187;H01L41/317;C23C18/12 |
主分类号 |
H01L41/18 |
代理机构 |
Arent Fox LLP |
代理人 |
Arent Fox LLP |
主权项 |
1. A piezoelectric thin film element comprising:
an electrode; and a piezoelectric film adjacent the electrode, wherein the piezoelectric film is a potassium sodium niobate film containing the general formula (1−n)(K1-xNax)NbyO3-nBaZrO3 as its main constituent, and x, y, and n respectively are within the ranges of: 0.25≦x≦0.75; 0.85≦y≦1.10; and 0.01≦n≦0.10. |
地址 |
Nagaokakyo-Shi, Kyoto-Fu JP |