发明名称 BATCH PROCESS FABRICATION OF PACKAGE-ON-PACKAGE MICROELECTRONIC ASSEMBLIES
摘要 A microelectronic assembly can be made by joining first and second subassemblies by electrically conductive masses to connect electrically conductive elements on support elements of each subassembly. A patterned layer of photo-imageable material may overlie a surface of one of the support elements and have openings with cross-sectional dimensions which are constant or monotonically increasing with height from the surface of that support element, where the masses extend through the openings and have dimensions defined thereby. An encapsulation can be formed by flowing an encapsulant into a space between the joined first and second subassemblies.
申请公布号 US2016260696(A1) 申请公布日期 2016.09.08
申请号 US201615153188 申请日期 2016.05.12
申请人 Invensas Corporation 发明人 Haba Belgacem;Mohammed Ilyas;Wang Liang
分类号 H01L25/00;H01L23/31;H01L25/065 主分类号 H01L25/00
代理机构 代理人
主权项 1. A method of fabricating a microelectronic assembly, comprising: joining first and second subassemblies to form an assembly, the assembly comprising a first support element and a second support element, the first support element having an outwardly-facing first surface facing a first direction, and the second support element having an outwardly-facing first surface facing a second direction opposite from the first direction, the first support element having electrically conductive first elements at an inwardly-facing second surface thereof, and the second support element having electrically conductive second elements at an inwardly-facing second surface thereof, at least one microelectronic element being mounted overlying the second surface of one of the first and second support elements, a patterned layer of photo-imageable material overlying the second surface of one of the first or second support elements, the patterned layer having openings with cross-sectional dimensions which are constant or increase with height from the surface of the support element over which the patterned layer lies, and the assembly further comprising masses of bonding material extending from the first elements through the openings and electrically coupled with the second elements, the masses having cross-sectional dimensions defined by the cross-sectional dimensions of the openings; and flowing an encapsulant into a space between the first and second subassemblies to form an encapsulation contacting surfaces of at least portions of the masses.
地址 San Jose CA US