Lactate-containing corrosion inhibitor

摘要

The corrosion of aluminum-based metal films may be minimized by applying a lactate-containing solution to the aluminum-based metal films before the aluminumbased metal films are etched. The lactate-containing solution is applied to the aluminum-based metal film before the film is etched with a corrosive etchant. Minimizing the corrosion of the aluminum-based film may increase the yield and performance of the highly reflective pixel arrays that are formed from the aluminumbased metal for use in liquid crystal on silicon (LCOS) microprocessors for digital televisions.