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发明名称
BACKFILL PREVENTING VALVE OF PUMPING LINE FOR SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT
摘要
申请公布号
KR20070041206(A)
申请公布日期
2007.04.18
申请号
KR20050097102
申请日期
2005.10.14
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOI, YOUNG JIN
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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