METHOD FOR ASHING SUBSTRATES,申请号KR20050111855-传众专利搜索

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发明名称	METHOD FOR ASHING SUBSTRATES
摘要
申请公布号	KR100710705(B1)	申请公布日期	2007.04.17
申请号	KR20050111855	申请日期	2005.11.22
申请人	PSK INC.	发明人	LIM, YOUNG KIL
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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